We maintain a wide variety of facilities for synthesis and analysis of photonic and electronic materials and devices. We also use the state-of-the-art cleanroom facilities in the Caltech Kavli Nanoscience Institute.

Synthesis:

Oxide Molecular Beam Epitaxy
RF Magnetron Sputtering System
UHV Hot Wire CVD and PECVD Cluster Tool
Metal Evaporator
II-VI Semiconductor Nanocrystal Wet Prep Facility
Wafer Bonding System
UV Ozone Cleaning System
Optical Photolithography Facility
Electron-Beam Lithography Facility
Pulsed Laser Deposition System
Inductively Coupled Plasma Etchers
Plasma Asher
Rapid Thermal Annealing Facility
Chlorosilane VLS CVD Reactor

Characterization:

Auger/XPS/SIMS Facility
Scanning Electron Microscopy
Transmission Electron Microscopy
Ambient Atomic Force/Electrostatic Force Microscopy
UHV Variable Temperature Scanning Tunneling Microscopy
Near Field Scanning Optical Microscopy
Spectroscopic Ellipsometry
Fourier Transform Infrared Spectroscopy
Visible and Infrared Spectroscopy Facilities
Argon, Excimer, and Tunable Dye Laser Sources
Solar Test Station with Solar Simulator, Spectral Response, and Suns VOC
Near-Infrared Fiber-Coupled Waveguide Test Station