Watson Labs

Kavli Nanoscience Inst.

KNI Facilities
We maintain a wide variety of facilities for synthesis and analysis of photonic and electronic materials and devices. We also use the state-of-the-art cleanroom facilities in the Caltech Kavli Nanoscience Institute.


  • Oxide Molecular Beam Epitaxy
  • RF Magnetron Sputtering System
  • UHV Hot Wire CVD and PECVD Cluster Tool
  • Metal Evaporator
  • II-VI Semiconductor Nanocrystal Wet Prep Facility
  • Wafer Bonding System
  • UV Ozone Cleaning System
  • Optical Photolithography Facility
  • Electron-Beam Lithography Facility
  • Pulsed Laser Deposition System
  • Inductively Coupled Plasma Etchers
  • Plasma Asher
  • Rapid Thermal Annealing Facility
  • Chlorosilane VLS CVD Reactor


  • Auger/XPS/SIMS Facility
  • Scanning Electron Microscopy
  • Transmission Electron Microscopy
  • Ambient Atomic Force/Electrostatic Force Microscopy
  • UHV Variable Temperature Scanning Tunneling Microscopy
  • Near Field Scanning Optical Microscopy
  • Spectroscopic Ellipsometry
  • Fourier Transform Infrared Spectroscopy
  • Visible and Infrared Spectroscopy Facilities
  • Argon, Excimer, and Tunable Dye Laser Sources
  • Solar Test Station with Solar Simulator, Spectral Response, and Suns VOC
  • Near-Infrared Fiber-Coupled Waveguide Test Station