Synthesis

  • Oxide Molecular Beam Epitaxy
  • RF Magnetron Sputtering System
  • UHV Hot Wire CVD and PECVD Cluster Tool
  • Metal Evaporator
  • II-VI Semiconductor Nanocrystal Wet Prep Facility
  • Wafer Bonding System
  • UV Ozone Cleaning System
  • Optical Photolithography Facility
  • Electron-Beam Lithography Facility
  • Pulsed Laser Deposition System
  • Inductively Coupled Plasma Etchers
  • Plasma Asher
  • Rapid Thermal Annealing Facility
  • Chlorosilane VLS CVD Reactor