- Oxide Molecular Beam Epitaxy
- RF Magnetron Sputtering System
- UHV Hot Wire CVD and PECVD Cluster Tool
- Metal Evaporator
- II-VI Semiconductor Nanocrystal Wet Prep Facility
- Wafer Bonding System
- UV Ozone Cleaning System
- Optical Photolithography Facility
- Electron-Beam Lithography Facility
- Pulsed Laser Deposition System
- Inductively Coupled Plasma Etchers
- Plasma Asher
- Rapid Thermal Annealing Facility
- Chlorosilane VLS CVD Reactor